Wafer Handling Vacuum Wand Body – Anti-static PEEK

Material: Anti-static PEEK

Button: Normal open

Fitting: Press-fit

Description

ESD PEEK (Anti-static PEEK) is an electrically modified plastic material with a defined surface resistance between 10⁶ -10⁹ Ω. Due to its electrostatic dissipation properties, this material is commonly used in applications within the semi-conductor industry. ESD PEEK has excellent dimensional stability and can be machined easily to very tight tolerances.

Feature

– Surface resistivity of 10⁶ – 10⁹ Ω

– High structural strength and stiffness

– Excellent dimensional stability

– High Temperature Resistance

Applications

– Critical test fixture applications

– Wafer handling

– Structural applications in wet process tools where static dissipation is important

– ensitive circuits, circuit boards and hard drive disks

– Components in high-speed electronic printing

Standard Size of PEEK ESD Plate

– Szie: 500mm (W) × 1000mm (L); Width is unchangable, Length can be customized.

– Thickness: 6, 8, 10, 12, 15, 20, 25…..60mm;

Tolerance: 6/8/10/12mm is +0.3~0.8mm; Above is +0.3~1.2mm.

ESD PEEK TECHNICAL DATA SHEET

Item	Norm	Unit	Value
Physical Properties
Color	–	–	Black
Density	ISO 1183-1	g/cm³	1.43
Water Abs. (25℃.24Hrs)	ISO 62	%	0.2
Thermal Properties
Melting point	ISO 11357	℃	343
Heat deflection temperature	ISO 75-1/-2	℃	152
Continuous using temperature	UL 74685	℃	260
Glass transition temperature	ISO 11357	℃	143
Machanical Properties
Tensile strength(23℃)	ISO527-2/1B/50	Mpa	110
Tensile elongation(23℃)	ISO527-2/1B/50	%	20
Tensile Modulus of elasticity	ISO527	Mpa	3800
Notched Impact Strength(charpy)	ISO79	KJ/m^-2	8.2
Shore D hardness	ISO 2039-2	–	88
Electrical Properties
Surface Resistivity	VDE0303	Ω	10^6-9
Volume Resistvity	VDE0303	Ω	10^6-9
Dielectric constant	DIN53483	–	3.2
Dielectric Loss Coefficient	DIN53483	–	0.003
Dielectric strength	VDE0303	kV/mm	19
Miscellaneous Data
Flammability	UL 94	–	V0